JPS5147154B2 - - Google Patents

Info

Publication number
JPS5147154B2
JPS5147154B2 JP3091772A JP3091772A JPS5147154B2 JP S5147154 B2 JPS5147154 B2 JP S5147154B2 JP 3091772 A JP3091772 A JP 3091772A JP 3091772 A JP3091772 A JP 3091772A JP S5147154 B2 JPS5147154 B2 JP S5147154B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3091772A
Other languages
Japanese (ja)
Other versions
JPS4897775A (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3091772A priority Critical patent/JPS5147154B2/ja
Publication of JPS4897775A publication Critical patent/JPS4897775A/ja
Publication of JPS5147154B2 publication Critical patent/JPS5147154B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3091772A 1972-03-28 1972-03-28 Expired JPS5147154B2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3091772A JPS5147154B2 (en]) 1972-03-28 1972-03-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3091772A JPS5147154B2 (en]) 1972-03-28 1972-03-28

Publications (2)

Publication Number Publication Date
JPS4897775A JPS4897775A (en]) 1973-12-12
JPS5147154B2 true JPS5147154B2 (en]) 1976-12-13

Family

ID=12317039

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3091772A Expired JPS5147154B2 (en]) 1972-03-28 1972-03-28

Country Status (1)

Country Link
JP (1) JPS5147154B2 (en])

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5351862Y2 (en]) * 1973-05-12 1978-12-12
JPS51107287A (ja) * 1975-03-18 1976-09-22 Fujikoshi Kk Koshitsuhimakukeiseisochi
JPS51145333A (en) * 1975-06-09 1976-12-14 Shuzo Hattori Manufacturing method of multi-layer dielectric film reflector
JPS5266756U (en]) * 1975-11-13 1977-05-17
JPS5458690A (en) * 1977-10-19 1979-05-11 Hitachi Ltd Vapor deposition apparatus
JP2002355509A (ja) * 2001-05-31 2002-12-10 Nifco Inc メッシュとその製造方法、及びメッシュを用いたフィルタとその製造方法

Also Published As

Publication number Publication date
JPS4897775A (en]) 1973-12-12

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